ARTIC TEMPERATURE CHUCK
The Artic TC series of temperature controlled chucks are used for test and characterization and failure analysis of semiconductor wafers and other components at hot and cold temperatures.
Each system comprises a temperature controlled chuck and sophisticated PID controller. Model TC2000 is provided with a cooler / heat exchanger for operation at temperatures below ambient. Models TC6000 and TC8000 are supplied with a self contained chiller.

Precision Temperature Control
Chucks are available in 4, 6 and 8 inches diameters to accommodate wafers of different sizes. The Chuck surface is gold plated and has independent vacuum lines for holding the wafers.
The ARTIC Temperature Chucks have many advanced design features which ensure excellent thermal, electrical and mechanical performance with high reliability.
Mechanical interface kits and dedicated configurations are available to adapt the ARTIC Temperature Chucks to most probing stations.
Wide Temperature Range
Model |
Range |
TC2000 |
0°C to +200°C |
TC4000 |
Amb to +300°C |
TC6000 |
-65°C to +135°C |
TC8000 |
-65°C to +200°C |
气动机械传输系统
Stability +/- 0°C
User Friendly Controller
Touch Screen Operation IEEE 488.2 & R232C interfaces
Unique Mechanical
Minimizes thermal expansion
Complete Family of Chucks

Four Standard models are available.:
TC 2000 0°C to +200°C
TC 4000 Amb to +300°C
TC 6000 -65 °C to +135°C
TC 8000 -65 °C to +200°C
Chucks which operate over other temperature ranges are also available for special applications.
Temperature Chuck Weights and Dimensions
Chuck | Actual Diameter | Height | Weight |
4 inch (102mm) | 4.25 inch (108mm) | 1.10inches (28mm) | 2 lbs (0.9kg) |
6 inch (152mm) | 6.25 inch (159mm) | 1.10inches (28mm) | 3 lbs (1.4kg) |
8 inch (203mm) | 8.25 inch (210mm) | 1.10 inches (28mm) | 6 lbs (2.7kg) |
Power Requirements , System Weights and Dimension
Unit | Power | Width | Height | Depth | Weight |
TC 1000* Controller | 115v/18A 220V/10A |
24 inch* (610mm)
|
7 inch (180mm)
|
24 inch (610mm)
|
50lbs (22.47kg) |
RCL500 Cooler * TC2000 chucks |
115v/5A 220V/3A
|
24 inch* (610mm)
|
10 inch (225mm)
|
24 inch (610mm)
|
45lbs (20.4kg) |
RCL502 Cooler TC2000/TC4000 |
115v/5A 220V/3A
|
8 inch* (203mm)
|
12 inch (305mm)
|
16 inch (406mm)
|
23lbs (10.40kg) |
RCL2000 Chiller TC6000/TC8000 |
220V/25A |
21 inch* (535mm)
|
48 inch (1213mm)
|
29 inch (740mm)
|
390lbs (177.3mm) |
*Specifications may change without notice