ARTIC TEMPERATURE CONTROLLED WAFER CHUCKS

The Artic TC series of temperature controlled wafer chucks are used for test and characterization of semiconductor wafers and other components at hot and cold temperatures.

Several models are available with temperature ranges from -65 degrees C to + 400 degrees C. Chucks are available in 4,6,8 and 12 inch diameters. These systems offer several design features which provide excellent performance to meet the most demanding customer applications.

Trio-Tech provides full turn-key solutions for wafer probing at hot and cold temperatures including triaxial guarding, rapid cool down units, probe station adapters, environmental enclosures, air dryers and dew point monitors.

   Product Range and Applications    More Information

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    300mm Artic Chucks    More Information


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SPECIFICATIONS FOR ARTIC CHUCKS

Series 2000 ARTIC Chucks (0ºC to 200ºC)
Series 4000 ARTIC Chucks (amb. to 300ºC)
Series 5000 ARTIC Chucks (amb. to 400ºC)
Series 8000 ARTIC Chucks (-65ºC to 200ºC)


APPLICATION NOTES

A variety of Application notes for the ARTIC Chucks are available and can be provided upon request. Please request the applicable identification number for the required Application Note under the comments section of the "Contact Us" page.

APPLICATION NOTE IDENTIFICATION NUMBER
Configuring A System AP010
Environmental Enclosures and Control AP011
Automatic Wafer probing at Hot and Cold Temperatures AP012
Low Current Wafer probing Over Temperature AP014
Artic TC2000S 14x14 inch Temperature Chuck AP015
Socket Adapters AP016
Artic M Test Heads AP018
Low Temperature Wafer probing with Artic TC8800 AP019
Artic TC5000 - High Temperature Chuck AP020



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