UNIQUE HEATER/CHILLER DESIGN HIGH PROBE FORCE CAPABILITY HIGH POWER DEVICE TESTING WIDE TEMPERATURE RANGES HIGH ISOLATION AND TRIAXIAL OPTIONS AVAILABLE LOW HEIGHT AND WEIGHT
DESCRIPTION
The new Artic TC3800 has been developed to meet the demanding requirements of 200 mm wafer production probing applications. The unique design, for which patents are pending, offers exceptional mechanical strength for high probing forces while providing the convenience of a temperature controlled chuck with excellent temperature performance. The Artic TC3800 is ideally suited for continuous high temperature testing and high power applications. Unique heater/chiller design: The design and construction of the Artic TC3800 is the result of extensive research and development by Trio-Tech. The design combines the latest heater and materials technologies to provide a temperature controlled chuck with low height and weight yet with exceptional mechanical strength. The chuck is designed for high wafer probing forces and for testing high power devices. The unique design offers low thermal resistance and good power dissipation which are essential for high power test applications.
FEATURES
Model Temperature Range Chiller High Isolation Option Triaxial Option High Probe Force High Power Testing TC3800-1 0ºC to +200ºC RCL800 YES YES YES YES TC3800-2 0ºC to +300ºC RCL800 YES YES YES YES TC3800-3 -60ºC to +200ºC RCL2000 YES YES YES YES TC3800-4 -60ºC to +300ºC RCL2000 YES YES YES YES SPECIFICATIONS: PARAMETER TC3800-1/2 TC3800-3/4 Temperature Range 0°C to +200/300°C -60°C to +200/300°C Temperature Accuracy ±0.5°C ±0.5°C Temperature Uniformity ±1.0°C or ±1.0% of set value ±1.0°C or ±1.0% of set value Temperature Stability ±0.1°C ±0.1°C Ramp Rates 0°C to+25°C /+25°C to 0°C +25°C to +200°C /+200°C to +25°C +25°C to +300°C /+300°C to +25°C -60°C to +25°C /+25°C to -60°C 5 min / 6 min 10 min / 20 min 20 min / 30 min N/A 5 min / 6 min 10 min / 15 min 20 min / 25 min 10min / 20min Chuck Top Flatness £ 25 µm £ 25 µm Chuck Top Stiffness (deflection with 55 Kg load at 90mm from the chuck center on 20 x 20 mm area) £ 10 µm £ 10 µm Isolation Chuck Top to Ground - (Coaxial) Chuck Top to Ground - (High Isolation) Chuck Top to Ground - (Triaxial) Chuck Top to Guard - (Triaxial) ³ 1GW ³ 1TW ³ 1TW ³ 1TW ³ 1GW ³ 1TW ³ 1TW ³ 1TW Capacitance Chuck Top to Ground - (Coaxial) Chuck Top to Ground - (High Isolation) Chuck Top to Ground - (Triaxial) Chuck Top to Guard - (Triaxial) £ 1400pF £ 500pF £ 300pF £ 500pF £ 1400pF £ 500pF £ 300pF £ 500pF Leakage current with Triaxial Guarding @ 30°C £ 50fA £ 50fA Chuck Diameter 8 in. / 205 mm 8 in. / 205 mm Height (typical) (Coaxial) (Triaxial) 0.8 in. / 21 mm 1.1 in. / 28 mm 0.8 in. / 21 mm 1.1 in. / 28 mm Weight (typical) (Coaxial) (Triaxial) 4 lbs. / 1.8 Kg 5.8 lbs / 26 Kg 4 lbs. / 1.8 Kg 5.8 lbs / 26 Kg *Specifications may change without notice

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