|
PARAMETER
|
TC21200
|
TC81200
|
| Temperature
Range |
0°C
to +200°C
|
-65°C
to +200°C
|
| Temperature
Accuracy |
±0.5°C
|
±0.5°C
|
| Temperature
Uniformity |
±1.0°C
or ±1.0% of set
value
|
±1.0°C
or ±1.0% of set value
|
| Temperature
Stability |
±0.1°C
|
±0.1°C
|
Ramp
Rates - Optimum
0°C to + 25°C /+25°C to 0°C
+25°C to +200°C /+200°C to +25°C
+25°C to +300°C /+300°C to +25°C
-65°C to +25°C /+25°C to -65°C |
2 min / 2 min
6 min / 6 min
N/A
N/A
|
2 min / 2 min
6 min / 6 min
N/A
10
min / 16 min
|
| Chuck
Top Flatness |
£
25 µm
|
£
25 µm
|
Isolation
Chuck Top to Ground - (Coaxial)
Chuck Top to Ground - (High Isolation)
Chuck Top to Ground - (Triaxial)
Chuck Top to Guard - (Triaxial)
|
£ 5GW
N/A
£ 1TW
£ 1TW
|
£ 5GW
N/A
£ 1TW
£ 1TW
|
Capacitance
Chuck Top to Ground - (Coaxial)
Chuck Top to Ground - (High Isolation)
Chuck Top to Ground - (Triaxial)
Chuck Top to Guard - (Triaxial)
|
£1400pF
N/A
£ 300pF
£ 500pF
|
£ 1400pF
N/A
£ 300pF
£ 500pF
|
| Leakage
current with Triaxial Guarding @ 30°C |
£
50fA
|
£
50fA
|
| Chuck
Diameter |
12.25
in. / 311 mm
|
12.25
in. / 311 mm
|
Height
(typical)
(Coaxial)
(Triaxial)
|
1.20 in. / 30 mm
1.80 in. / 46 mm
|
1.20 in. / 30 mm
1.80 in. / 46 mm
|
Weight
(typical)
(Coaxial)
(Triaxial) |
8 lbs. / 3.64 Kg
12 lbs. / 5.45 Kg
|
8 lbs. / 3.64 Kg
12 lbs. / 5.45 Kg
|
|
PARAMETER
|
TC31200
- 1/2
|
TC31200
- 3/4
|
| Temperature
Range |
0°C
to +200/300°C
|
-60°C
to +200/300°C
|
| Temperature
Accuracy |
±0.5°C
|
±0.5°C
|
| Temperature
Uniformity |
±1.0°C
or ±1.0% of set
value
|
±1.0°C
or ±1.0% of set value
|
| Temperature
Stability |
±0.1°C
|
±0.1°C
|
Ramp
Rates - Optimum
0°C to +25°C /+25°C to 0°C
+25°C to +200°C /+200°C to +25°C
+25°C to +300°C /+300°C to +25°C
-60°C to +25°C / +25°C to -60°C |
5 min / 6 min
10 min / 20 min
20 min / 30 min
N/A
|
5 min / 6 min
10 min / 15 min
20 min / 25 min
15 min / 20 min
|
| Chuck
Top Flatness |
£
25 µm
|
£
25 µm
|
Isolation
Chuck Top to Ground - (Coaxial)
Chuck Top to Ground - (High Isolation)
Chuck Top to Ground - (Triaxial)
Chuck Top to Guard - (Triaxial)
|
£ 1GW
£ 1TW
£ 1TW
³
1TW
|
£ 1GW
£ 1TW
£ 1TW
³
1TW
|
Capacitance
Chuck Top to Ground - (Coaxial)
Chuck Top to Ground - (High Isolation)
Chuck Top to Ground - (Triaxial)
Chuck Top to Guard - (Triaxial)
|
£ 1400pF
£ 500pF
£ 300pF
£ 500pF
|
£ 1400pF
£ 500pF
£ 300pF
£ 500pF
|
| Leakage
current with Triaxial Guarding @ 30°C |
£
50fA
|
£
50fA
|
| Chuck
Diameter |
12.05
in. / 306 mm
|
12.05
in. / 306 mm
|
Height
(typical)
(Coaxial)
(Triaxial) |
1.30 in. / 33 mm
1.93 in. / 49 mm
|
1.30 in. / 33 mm
1.93 in. / 49 mm
|
Weight
(typical)
(Coaxial)
(Triaxial) |
13
lbs. / 5.91 Kg
19 lbs. / 8.64 Kg
|
13
lbs. / 5.91 Kg
19 lbs. / 8.64 Kg
|